Formation and structure of epitaxial NiSi2 and CoSi2

Interactions in the Co/Si thin-film system. I. Kinetics

S.S. Lau, J. W. Mayer, K. N. Tu · Journal of Applied Physics · 1978 · 195 citations

Natural Sciences, Materials Engineering, Materials Science +17

Double heteroepitaxy in the Si (111)/CoSi2/Si structure

Shyuichi Saitoh, Hiroshi Ishiwara, Seijiro Furukawa · Applied Physics Letters · 1980 · 173 citations

Engineering, Materials Engineering, Materials Science +16

Silicon/metal silicide heterostructures grown by molecular beam epitaxy

J. C. Bean, J. M. Poate · Applied Physics Letters · 1980 · 167 citations

Engineering, Materials Engineering, Materials Science +17

Cross-sectional transmission electron microscopy of silicon-silicide interfaces

F. Föll, P Shing Ho, K. N. Tu · Journal of Applied Physics · 1981 · 139 citations

Engineering, Materials Science, Physics +17

Transmission electron microscopy of cross sections of large scale integrated circuits

T. T. Sheng, Chyh-Yih Chang · IEEE Transactions on Electron Devices · 1976 · 138 citations

Engineering, Electrical Engineering, Materials Science +15