Concepedia

Publication | Closed Access

Fabrication of UV-transparent SixOyNz membranes with a low frequency PECVD reactor

DOI

15

Citations

8

References

2002

Year

K. Danaie, Alain Bosseboeuf, C. Clerc, C. Gousset, G Julie
Sensors and Actuators A Physical

References

YearCitations

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