Fabrication of UV-transparent SixOyNz membranes with a low frequency PECVD reactor

The tension of metallic films deposited by electrolysis

G. Stoney · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1909 · 4.8K citations · Full text

Natural Sciences, Chemistry, Materials Science +11

Calculated elastic constants for stress problems associated with semiconductor devices

William A. Brantley · Journal of Applied Physics · 1973 · 1.2K citations

Natural Sciences, Materials Engineering, Materials Science +17

Bulk micromachining of silicon

G.T.A. Kovacs, N.I. Maluf, K. Petersen · Proceedings of the IEEE · 1998 · 721 citations

Engineering, Materials Engineering, Materials Science +17

Improvement of the quality factor of RF integrated inductors by layout optimization

J.M. López-Villegas, Josep Samitier, C. Cané et al. · IEEE Transactions on Microwave Theory and Techniques · 2000 · 271 citations · Full text

Engineering, Electrical Engineering, Design Optimization +16

Microsensors: principles and applications

Choice Reviews Online · 1995 · 201 citations

Engineering, Chemical Engineering, Electrical Engineering +10