Lubrication of silicon micromechanisms by chemical grafting of long-chain molecules

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

Engineering, Materials Engineering, Materials Science +16

The Stress Field Created by a Circular Sliding Contact

G. M. Hamilton, L. E. Goodman · Journal of Applied Mechanics · 1966 · 761 citations

Engineering, Materials Science, Mechanical Engineering +17

A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs

Md. Shafiqul Islam, P.J. McNally · Microelectronic Engineering · 1998 · 606 citations

Engineering, Electrical Engineering, Materials Science +14

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations

Electrostatic-comb drive of lateral polysilicon resonators

William C. Tang, Tu-Cuong H. Nguyen, Michael W. Judy et al. · Sensors and Actuators A Physical · 1990 · 454 citations

Engineering, Electrical Engineering, Materials Science +9