2007 · 18 citations · 55 references
EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationVibrationMems DesignMems ModelingCapacitorsLow-frequency VibrationSurface ProfileSurface Profile Measurement
We have previously showed that microparts can be fed along a saw-tooth surface using simple planar symmetric vibration. Microparts move forward because they adhere to the saw-tooth surface asymmetrically. We studied also the effects of saw-tooth pitch and vibration frequency on the movement of 2012-type capacitors (size:2.0 times 1.2 times 0.6 mm, weight:7.5 mg). In the present work, we studied the movement of smaller 0603-type capacitors (size:0.6 times 0.3 times 0.3 mm, weight:0.3 mg). We analysed the contact between a micropart and a saw-tooth surface based on measurements. A microscope was used for the measurements of a 0603-type capacitor surface to obtain a precise surface profile model. Smaller capacitors rotated on the saw-tooth surface when they were moving in one direction. We thus examined the movement of smaller capacitors, and then examined the decrease of feeding velocity caused by this rotation and swinging of the smaller capacitors.
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