Design and noise consideration of an accelerometer employing modulated integrative differential optical sensing

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 1.6K citations

Natural Sciences, Materials Engineering, Materials Science +17

Mechanical-thermal noise in micromachined acoustic and vibration sensors

T. B. Gabrielson · IEEE Transactions on Electron Devices · 1993 · 737 citations · Full text

Engineering, Mechanical Engineering, Physics +17

On a Theorem of Irreversible Thermodynamics

Herbert B. Callen · Physical Review · 1952 · 537 citations

Natural Sciences, Physics, Dynamical Systems +15

Information Transmission, Modulation, and Noise

R.H. Barker · Physics Bulletin · 1960 · 275 citations

Engineering, Communication, Communication Theory +11