Concepedia

Publication | Closed Access

Dry etch chemistries for TiO2 thin films

DOI

69

Citations

21

References

2001

Year

S. Norasetthekul, P.Y. Park, Kwang Hyeon Baik, K.P. Lee, Jaeho Shin, B.-S. Jeong, V. Shishodia, E. S. Lambers, D. P. Norton, S. J. Pearton
Applied Surface Science

References

YearCitations

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