Concepedia

A study of the picostructure of sputtered ZrN films

A.J. Perry, J.P. Schaffer, J. Brunner, W.D. Sproul

Surface and Coatings Technology · 1991 · 21 citations · 30 references

DOI

Concepts

References

30

High Rate Thick Film Growth

John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations

, , +12

Young's modulus of TiN, TiC, ZrN and HfN

E. J. Torok, A.J. Perry, L. Chollet et al. · Thin Solid Films · 1987 · 275 citations

, , +6

Low-energy (∼100 eV) ion irradiation during growth of TiN deposited by reactive magnetron sputtering: Effects of ion flux on film microstructure

Lars Hultman, W.‐D. Münz, J. Musil et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 164 citations

, , +16

A contribution to the study of poisson's ratios and elasticconstants of TiN, ZrN and HfN

A.J. Perry · Thin Solid Films · 1990 · 113 citations

, , +10

Zirconium nitride films prepared by cathodic arc plasma deposition process

P. Johnson, H. S. Randhawa · Surface and Coatings Technology · 1987 · 105 citations

, , +9