Influence of the Strain on the Electrical Resistance of Zinc Oxide Doped Thin Film Deposited on Polymer Substrates

Abstract

Tensile tests were performed on PET films coated with Al doped zinc oxide films by RF magnetron sputtering. During the tensile elongation, the electrical resistanceof the oxide was evaluated in situ. The results indicate that the increase in the electrical resistance is related to the crack debsity and crack width, which also depends on the film thickness.