Effects of composition and thermal annealing on the mechanical properties of silicon oxycarbide films

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments

W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26.6K citations

Natural Sciences, Materials Engineering, Materials Science +16

Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology

W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 2004 · 7.8K citations

Natural Sciences, Materials Engineering, Materials Science +14

The tension of metallic films deposited by electrolysis

G. Stoney · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1909 · 4.8K citations · Full text

Natural Sciences, Chemistry, Materials Science +11

What is the Young's Modulus of Silicon?

Matthew A. Hopcroft, William D. Nix, Thomas W. Kenny · Journal of Microelectromechanical Systems · 2010 · 2K citations

Natural Sciences, Materials Science, Mechanical Engineering +17

Influences of pileup on the measurement of mechanical properties by load and depth sensing indentation techniques

Alexei Bolshakov, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1998 · 937 citations

Natural Sciences, Civil Engineering, Materials Science +14