SID Symposium Digest of Technical Papers · 2014 · 80 citations · 6 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsAmorphous Electronic MaterialsAmorphous SemiconductorsMetal OxidesMetal-oxide-semiconductor Field-effect TransistorsOxide SemiconductorsSemiconductor Device MaterialsAmorphous Oxide SemiconductorsAmorphous OxidesOxide Thin-film TransistorsSemiconducting Oxide MaterialsSemiconductor Oxide Thin FilmsThin Oxide FilmsThin-film OxidesWide-bandgap Oxides
Abstract Oxide semiconductors as represented by InGaZnO have been developed and used for driving TFT of LCD. Since there have been discussions on comparison of oxide semiconductors with amorphous and/or poly‐silicon which have been conventionally used for LCD, this paper will summarize pros and cons of each semiconductor material, deepen discussions for future developments, and clarify advantages of oxide semiconductors.
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Noboru Kimizuka, Takahiko Mohri · Journal of Solid State Chemistry · 1985 · 234 citations
Natural Sciences, Materials Engineering, Materials Science +14