Publication | Closed Access
15.1: Research, Development, and Application of Crystalline Oxide Semiconductor
175
Citations
7
References
2012
Year
Materials ScienceSemiconductorsC‐axis AlignmentEngineeringDisplay TechnologyOxide ElectronicsCrystalline Oxide SemiconductorOxide SemiconductorsApplied PhysicsAdvanced Display TechnologyCrystalline IgzoSemiconductor MaterialTechnologyMicroelectronicsCrystallography
Abstract The study of IGZO was started by Kimizuka et al. in 1985. IGZO is developed as a material for displays. We found crystalline IGZO having c‐axis alignment and have studied its application to displays, memories, processors, etc. Crystalline IGZO is expected to be used in a variety of applications.
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