Publication | Closed Access
Load effects on the phase transformation of single-crystal silicon during nanoindentation tests
89
Citations
16
References
2006
Year
Materials ScienceNanoindentation TestsEngineeringMicrofabricationPhase TransformationApplied PhysicsLoad EffectsSemiconductor Device FabricationNanometrologySilicon On InsulatorNanomechanicsMechanics Of MaterialsMicrostructureSilicon Debugging
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