Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 10 citations · 0 references
EngineeringElectrical EngineeringMicrofabricationOptoelectronicsPhotonicsIntegrated OpticsIntegrated PhotonicsOptical InterconnectsOptical WaveguidesPhotonic Integrated CircuitsWaveguidesDevice FabricationFiber-to-chip CouplingGuided WavesIntegrated Optical WaveguidesIntegrated WaveguidesWaveguide DesignWaveguide FabricationWaveguide Loss
An optimized waveguide taper structure is investigated for the efficient spot-size transformation of guided waves on InP-based optoelectronically integrated circuits. The simple two-layer structure is suitable for very low-loss chip-fiber interconnections. Using a special layout and process steps, the earlier strong requirements on lithographic resolution can be reduced to values of 200–300 nm, maintaining, however, the low-loss transformation properties. The quality of different process sequences are compared with respect to their loss properties.