Evaluation of novel tooling for nanoscale injection molding

Sung‐Hwan Yoon, Chinnawat Srirojpinyo, Jun S. Lee, Joey Mead, Shinji Matsui, Carol M. F. Barry

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 11 citations · 0 references

Concepts

Abstract

Injection molding technology is one of the most promising candidates for the economically viable manufacturing of nanoscale parts, but the composition and surface properties of tooling materials become more critical as the size of the molded features decreases. In the study, the effect of novel tooling with micro and nanoscale features was investigated by employing this tooling as inserts for micro injection molding of polycarbonate. Parts molded from etched silicon wafers with pattern depths of 300 nm and widths of 200 to 980 nm showed a significant decrease in replication quality with the size the features, probably because polymer adhered to the tooling surface. Silicon tooling from a different source and titanium-coated gallium arsenide tooling produced higher quality replication. The replication quality from the silicon tooling, however, was constant over 3000 molding cycles and coated gallium arsenide inserts survived the molding pressures; (the uncoated gallium arsenide fractured). These findings suggest that modifications to the insert surfaces will allow for viable tooling for injection molding of plastic parts with nanoscale features.