Concepedia
Journal of Nuclear Materials · 1995 · 15 citations · 3 references
Natural SciencesMaterials SciencePhysicsThin FilmsScattering TheoryAngular DependenceSelf-sputteringSputter DepositionSputteringSputtering Processes
3
The effects of surface roughness characterized by fractal geometry on sputtering
D. N. Ruzic · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1990 · 102 citations
Natural Sciences, Materials Engineering, Materials Science +14
Beryllium self-sputtering: An interpolation of data for D, He, Ne and Ar
J. Roth, W. Eckstein, J. Bohdansky · Journal of Nuclear Materials · 1989 · 31 citations
Natural Sciences, Materials Science, Physics +7
Sputtering of low-Z materials
J. Roth, W. Eckstein, E. Gauthier et al. · Journal of Nuclear Materials · 1991 · 25 citations
Natural Sciences, Materials Science, Physics +9