Concepedia

Beryllium self-sputtering: An interpolation of data for D, He, Ne and Ar

J. Roth, W. Eckstein, J. Bohdansky

Journal of Nuclear Materials · 1989 · 31 citations · 15 references

DOI

Concepts

References

15

Sputtering studies with the Monte Carlo Program TRIM.SP

J.P. Biersack, W. Eckstein · Applied Physics A · 1984 · 916 citations

, , +8

Calculations of nuclear stopping, ranges, and straggling in the low-energy region

W. D. Wilson, L.G. Haggmark, J.P. Biersack · Physical review. B, Solid state · 1977 · 810 citations

, , +14

Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev

N. Laegreid, G. K. Wehner · Journal of Applied Physics · 1961 · 807 citations

, , +13

Computer studies of the reflection of light ions from solids

O.S. Oen, Mark T. Robinson · Nuclear Instruments and Methods · 1976 · 675 citations

, , +9

Sputtering Yields for Low Energy He+-, Kr+-, and Xe+-Ion Bombardment

Duane Rosenberg, G. K. Wehner · Journal of Applied Physics · 1962 · 431 citations

, , +5