Concepedia

Reactive high rate d.c. sputtering of oxides

Michael Scherer, P. Wirz

Thin Solid Films · 1984 · 44 citations · 6 references

DOI

Concepts

References

6

Sputtering of Dielectrics by High-Frequency Fields

G. S. Anderson, W. Mayer, G. K. Wehner · Journal of Applied Physics · 1962 · 129 citations

, , +16

Discharge characteristics for magnetron sputtering of Al in Ar and Ar/O2 mixtures

S. Maniv, W. D. Westwood · Journal of Vacuum Science and Technology · 1980 · 114 citations

, , +13

Transparent conducting zinc oxide and indium–tin oxide films prepared by modified reactive planar magnetron sputtering

S. Maniv, C. J. Miner, W. D. Westwood · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1983 · 60 citations

, , +17

High rate deposition of transparent conducting films by modified reactive planar magnetron sputtering of Cd2Sn alloy

S. Maniv, C. J. Miner, W. D. Westwood · Journal of Vacuum Science and Technology · 1981 · 45 citations

, , +17

Optical layers produced by sputtering

G. Kienel · Thin Solid Films · 1981 · 24 citations

, , +12