Publication | Closed Access
Atomic layer deposition of ZrO2 thin films using a new alkoxide precursor
48
Citations
12
References
2002
Year
Materials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsNew Alkoxide PrecursorThin FilmsChemical DepositionChemical Vapor DepositionAtomic Layer DepositionZro2 Thin FilmsThin Film Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1