Publication | Closed Access
Synthesis and microstructural characterisation of reactive RF magnetron sputtering AlN films for surface acoustic wave filters
51
Citations
12
References
2004
Year
Materials ScienceMagnetismMaterials EngineeringEngineeringMicrostructural CharacterisationAcoustic MetamaterialSurface ScienceApplied PhysicsReactive Rf MagnetronAln Films
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