Publication | Closed Access
Phase evolution in aluminum nitride thin films on Si(100) prepared by radio frequency magnetron sputtering
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Citations
18
References
2001
Year
Materials ScienceAluminium NitrideEpitaxial GrowthEngineeringPhysicsSurface ScienceApplied PhysicsRadio Frequency MagnetronThin FilmsMicroelectronicsChemical Vapor DepositionThin Film ProcessingPhase Evolution
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