Theoretical analysis of the sensing and actuating effects of piezoelectric multimorph cantilevers

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Engineering, Mechanical Engineering, Actuators +16

Working equations for piezoelectric actuators and sensors

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Engineering, Mechanical Engineering, Actuators +16

Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers

Lipeng Wang, R. A. Wolf, Yu Wang et al. · Journal of Microelectromechanical Systems · 2003 · 138 citations

Engineering, Materials Engineering, Materials Science +17

Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities

Chengkuo Lee, Toshihiro Itoh, Tadatomo Suga · Sensors and Actuators A Physical · 1999 · 129 citations

Engineering, Materials Science, Mechanical Engineering +16

Lead zirconate titanate films for d33 mode cantilever actuators

Q.Q. Zhang, Steven J. Gross, Srinivas Tadigadapa et al. · Sensors and Actuators A Physical · 2003 · 99 citations

Engineering, Materials Engineering, Materials Science +13