Impact of Chemomechanical Polishing on the Chemical Composition and Morphology of the Silicon Surface

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 1.6K citations

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Ideal hydrogen termination of the Si (111) surface

G. S. Higashi, Yves J. Chabal, Gary W. Trucks et al. · Applied Physics Letters · 1990 · 1.4K citations

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Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology

V. A. Burrows, Yves J. Chabal, G. S. Higashi et al. · Applied Physics Letters · 1988 · 459 citations · Full text

Natural Sciences, Materials Science, Physics +14

Investigations on hydrophilic and hydrophobic silicon (100) wafer surfaces by X-ray photoelectron and high-resolution electron energy loss-spectroscopy

M. Grundner, H.‐E. Jacob · Applied Physics A · 1986 · 411 citations

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Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: II . Influence of Dopants

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 377 citations

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