Concepedia

Managing arcs in large area sputtering applications

D. Carter, H. Walde, K. Nauman

Thin Solid Films · 2011 · 12 citations · 4 references

DOI

Concepts

References

4

Physics of arcing, and implications to sputter deposition

André Anders · Thin Solid Films · 2005 · 105 citations

, , +7

Arc generation from sputtering plasma-dielectric inclusion interactions

C. E. Wickersham, J. E. Poole, J. S. Fan · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 19 citations

, , +15

Measurements of the critical inclusion size for arcing and macroparticle ejection from aluminum sputtering targets

C. E. Wickersham, J. E. Poole, A. Leybovich et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 17 citations

, , +14

Video analysis of inclusion induced macroparticle emission from aluminum sputtering targets

C. E. Wickersham, J. E. Poole, J. S. Fan et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 11 citations

, , +11