High chemical vapour deposition rates of epitaxial silicon layers

A Stagnant Layer Model for the Epitaxial Growth of Silicon from Silane in a Horizontal Reactor

F. C. Eversteyn, P. J. Severin, C. H. J. v. d. Brekel et al. · Journal of The Electrochemical Society · 1970 · 273 citations

Engineering, Materials Engineering, Materials Science +10

Epitaxial Silicon Films by the Hydrogen Reduction of SiCl[sub 4]

H. C. Theuerer · Journal of The Electrochemical Society · 1961 · 158 citations

Natural Sciences, Chemistry, Materials Science +17

Emissivity at 0.65 Micron of Silicon and Germanium at High Temperatures

F. G. Allen · Journal of Applied Physics · 1957 · 123 citations

Engineering, Electrical Engineering, Materials Engineering +3

Epitaxial Growth of Silicon from the Pyrolysis of Monosilane on Silicon Substrates

B.A. Joyce, R. R. Bradley · Journal of The Electrochemical Society · 1963 · 92 citations

Natural Sciences, Materials Engineering, Materials Science +17

Vapor Phase Deposition and Etching of Silicon

W.H. Shepherd · Journal of The Electrochemical Society · 1965 · 73 citations

Engineering, Materials Engineering, Materials Science +15