Japanese Journal of Applied Physics · 1984 · 12 citations · 4 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistryPhysical ChemistrySemiconductor MaterialsMicrostructure EvolutionSilicon MaterialsAnnealingAnnealing EffectsAnnealing ProcessesAnnealing Temperature EffectsAnnealing Time EffectsSilicon AnnealingSurface Annealing
4