Atomically Resolved InP(110) Surface Observed with Noncontact Ultrahigh Vacuum Atomic Force Microscope

Abstract

Atomic resolution imaging of the cleaved InP(110) surface was demonstrated using an ultrahigh vacuum atomic force microscope (UHV-AFM) in a noncontact mode, for the first time. The force gradient acting on the tip was detected by the frequency modulation (FM) detection method. A rectangular lattice could be clearly resolved. Atomic defects were also clearly and reproducibly observed. These results suggest that the noncontact UHV-AFM has potential for imaging III-V compound semiconductor surfaces with true atomic-scale lateral resolution.