Journal of The Electrochemical Society · 1991 · 35 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceMicrofabricationSemiconductor DevicesThin FilmsNucleationSilicon MaterialsSubstrate PreparationThin Film NucleationThin-film DepositionThin-film PatterningElectrophoretic DepositionElectrophoretic TransportNucleation On Patterned SubstratesPhase NucleationPolycrystalline Thin FilmsSilicon
We demonstrate here an electrophoretic process for nucleating and patteming of silicon substrates for CVD of polycrystalline diamond films that is simpler than present methods and far less damaging to the underlying substrate