Concepedia

Arrays of silicon microdischarge devices with multicomponent dielectrics

Sung‐Jin Park, J. G. Eden, Jian Chen, C. Liu, J. J. Ewing

Optics Letters · 2001 · 19 citations · 5 references

DOI

Concepts

Abstract

Arrays as large as 15x15 of microdischarge devices having inverted pyramidal silicon cathodes (50mumx50mum) and SiO(2)- Si(3)N(4)- polymer composite dielectrics have been fabricated and characterized with Ne gas. The lifetimes, reliability, and ignition characteristics of the arrays are superior to those of earlier designs having a single polymer dielectric. Operating voltages as low as 150 V for a 10x10 pixel array and 1000 Torr of Ne have been measured. Single (50mumx50mum) pyramidal cathode devices operate at voltages as low as 113 V when the Ne pressure is 900 Torr.

References

5

Microdischarge devices fabricated in silicon

J. W. Frame, D. J. Wheeler, T. A. DeTemple et al. · Applied Physics Letters · 1997 · 136 citations

, , +13

Silicon microdischarge devices having inverted pyramidal cathodes: Fabrication and performance of arrays

Sung‐Jin Park, J. Chen, C. Liu et al. · Applied Physics Letters · 2001 · 85 citations

, , +16

Flexible microdischarge arrays: Metal/polymer devices

S.-J. Park, C. J. Wagner, C. M. Herring et al. · Applied Physics Letters · 2000 · 53 citations

, , +9

Continuous-wave emission in the ultraviolet from diatomic excimers in a microdischarge

J. W. Frame, P.C. John, T. A. DeTemple et al. · Applied Physics Letters · 1998 · 43 citations

, , +10

Performance of microdischarge devices and arrays with screen electrodes

S.-J. Park, C. J. Wagner, J. G. Eden · IEEE Photonics Technology Letters · 2001 · 15 citations

, , +14