Background of the titanium nitride deposition

Handbook of Thin Film Technology

L. I. Maissel, R. Glang, Paul P. Budenstein · Journal of The Electrochemical Society · 1971 · 2.8K citations

Natural Sciences, Materials Engineering, Materials Science +12

Plasma diagnostics with electric probes

R. M. Clements · Journal of Vacuum Science and Technology · 1978 · 117 citations

Natural Sciences, Physics, Instrumentation +12

Diagnostic methods for sputtering plasmas

John A. Thornton · Journal of Vacuum Science and Technology · 1978 · 88 citations

Natural Sciences, Physics, Plasma Physics +16