Applied Surface Science · 1998 · 21 citations · 9 references
EngineeringMaterials EngineeringMaterials ScienceCondensed Matter PhysicsElectronic MaterialsSemiconductor MaterialsChemical Vapor DepositionNanoelectronicsSemiconductor Device MaterialsSemiconductor HeterostructuresSemiconductor NanomaterialsSilicon MaterialsLow-pressure Chemical Vapor DepositionSiliconSilicon DioxideSilicon NanostructuresSuperlattice Growth
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Quantum confinement and light emission in SiO2/Si superlattices
Z. H. Lu, D. J. Lockwood, J.‐M. Baribeau · Nature · 1995 · 592 citations
SiO 2 film thickness metrology by x-ray photoelectron spectroscopy
Zhaoming Lu, J. P. McCaffrey, B. Brar et al. · Applied Physics Letters · 1997 · 225 citations
Natural Sciences, Materials Engineering, Materials Science +17