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Boron nitride films prepared by remote plasma-enhanced chemical vapour deposition from borazine (B3N3H6)

DOI

30

Citations

5

References

1994

Year

T. P. Smirnova, L.V. Jakovkina, I.L. Jashkin, N. P. Sysoeva, Ju.I. Amosov
Thin Solid Films

References

YearCitations

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