Applied Physics Letters · 2006 · 19 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceOpticsSpectroscopyThin FilmsAtomic Force MicroscopyOptical FibersOptical SpectroscopyRaman SpectroscopySilicon MaterialsThin Film StrainEvanescent WavesNear-field Atomic Force MicroscopyNear-field Optical MicroscopyNear-field OpticsRaman MicroscopyRaman Spectroscopy Strain AnalysisSiliconSilicon Thin Films
A solid immersion lens (SIL) is applied with Raman spectroscopy to selectively analyze strained silicon thin films. The SIL was fabricated using a high index optical fiber, n=1.9. The fabrication allows for integration with an atomic force microscope (AFM) for repeated approach and feedback of the SIL to the surface. The evanescent field emanating from the SIL was investigated using near-field optical microscopy and the decay length was ∼150nm. This was then combined with a Raman spectrometer coupled to an online AFM having a completely free optical axis permitting optical investigations of opaque samples such as strained silicon.
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Scott Mansfield, G. S. Kino · Applied Physics Letters · 1990 · 667 citations
Near-field optical data storage using a solid immersion lens
B. D. Terris, H. J. Mamin, D. Rugar et al. · Applied Physics Letters · 1994 · 364 citations
Natural Sciences, Materials Engineering, Materials Science +13