Publication | Closed Access
Energy harvesting MEMS device based on thin film piezoelectric cantilevers
332
Citations
6
References
2006
Year
Electrical EngineeringEnergy HarvestingEngineeringMicrofabricationEnergy ConversionPiezoelectric NanogeneratorsMems DevicePiezoelectric MaterialPiezoelectricityTechnologyMicroelectronicsMicro-electromechanical System
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