Top‐Down Nanomechanical Machining of Three‐Dimensional Nanostructures by Atomic Force Microscopy

Abstract

A closed-loop nanoscale precision stage is integrated with an atomic force microscope to mechanically fabricate 3D nanostructures according to predetermined designs, such as 3D human face nanostructures, nanoline arrays of sine-wave and triangular nanostructures, and nanodot arrays of sine-shaped, hemispheric, and concave/convex nanopatterns in a controllable and reproducible fashion.