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Optical Fiber Pyrometry with in-Situ Detection of Wafer Radiance and Emittance—Accufiber's Ripple Method

Optical MaterialsEngineeringOptical Fiber PyrometryOptical TestingOptical MetrologyFiber OpticsOptical CharacterizationCalibrationOptical PropertiesOptical SensorInstrumentationIn-situ DetectionOptical SystemsFiber Optic SensingFiber OpticRipple MethodOptical SensorsSpectroscopyApplied PhysicsOptical System Analysis