Preparation of α-alumina/polymethacrylic acid composite abrasive and its CMP performance on glass substrate

Chemical processes in glass polishing

Lee M. Cook · Journal of Non-Crystalline Solids · 1990 · 989 citations

Natural Sciences, Chemistry, Materials Science +11

Static Fatigue of Glass. I

R. J. Charles · Journal of Applied Physics · 1958 · 718 citations

Natural Sciences, Materials Engineering, Materials Science +15

Application of Chemical Mechanical Polishing to the Fabrication of VLSI Circuit Interconnections

W. Patrick, W. L. Guthrie, C. L. Standley et al. · Journal of The Electrochemical Society · 1991 · 237 citations

Engineering, Electrical Engineering, Materials Science +17

Ceria concentration effect on chemical mechanical polishing of optical glass

Liangyong Wang, Kailiang Zhang, Zhitang Song et al. · Applied Surface Science · 2006 · 136 citations

Natural Sciences, Materials Engineering, Materials Science +13

CMP of hard disk substrate using a colloidal SiO2 slurry: preliminary experimental investigation

Hong Lei, Jianbin Luo · Wear · 2004 · 134 citations

Natural Sciences, Materials Engineering, Materials Science +10