Publication | Closed Access
Preparation of α-alumina/polymethacrylic acid composite abrasive and its CMP performance on glass substrate
67
Citations
25
References
2008
Year
Materials EngineeringMaterials ScienceChemical EngineeringGlass-ceramicCmp PerformanceEngineeringCeramic MaterialGlass SubstrateCeramic PowdersAbrasive MachiningAbrasive Process
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