Superposition of fringelike-electron-emission pattern from radical-oxygen-gas exposed Pt field emitter fabricated by electron-beam-induced deposition

K. Murakami, Sadamitsu Nishihara, Naoki Matsubara, Satoshi Ichikawa, Fujio Wakaya, M. Takai

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 14 citations · 9 references

DOIFull text

Open access

Concepts

Abstract

Electron-beam deposited Pt emitters were exposed to radical-oxygen gas to remove the surface amorphous carbon layers of the emitters, resulting in observation of fringelike-electron-emission patterns. The superposition of electron-wave interferences due to electrons emitted from a Pt emitter was further observed. These emission patterns were found to be well reproduced by the Fraunhofer diffraction model. These results suggested that the electron-wave interference might take place by electrons emitted from emission sites of Pt nanocrystals.

References

9