Microelectronic Engineering · 2006 · 140 citations · 8 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationPolymer ChemistryMems FabricationMicrofabrication MaterialsMicrofabrication ProcessesMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidicsMicroscale FabricationPolydimethylsiloxane Device FabricationReplica Molding
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Nano-replication of diffractive optical elements in sol–gel derived glasses
V.K. Parashar, A. Sayah, Markus Pfeffer et al. · Microelectronic Engineering · 2003 · 32 citations · Full text