Nano-replication of diffractive optical elements in sol–gel derived glasses

Deep reactive ion etching of Pyrex glass using SF6 plasma

Xinghua Li, Takashi Abe, Masayoshi Esashi · Sensors and Actuators A Physical · 2001 · 217 citations

Engineering, Materials Engineering, Materials Science +13

Subwavelength-structured antireflective surfaces on glass

Andreas Gombert, Walther Glaubitt, Klaus Rose et al. · Thin Solid Films · 1999 · 197 citations

Natural Sciences, Materials Engineering, Materials Science +12

Replication techniques for diffractive optical elements

M. T. Gale · Microelectronic Engineering · 1997 · 171 citations

Natural Sciences, Materials Science, Optical Materials +11

Powder blasting for three-dimensional microstructuring of glass

E. Belloy, A. Sayah, Martin A. M. Gijs · Sensors and Actuators A Physical · 2000 · 67 citations · Full text

Engineering, Materials Engineering, Materials Science +6

High-efficiency blazed diffractive optical elements for the violet wavelength fabricated by electron-beam lithography

Teruhiro Shiono, Tetsuya Hamamoto, Koji Takahara · Applied Optics · 2002 · 50 citations

Engineering, Materials Engineering, Materials Science +13