Concepedia

Publication | Closed Access

Characterisation and integration feasibility of JSR’s low-k dielectric LKD-5109

DOI

20

Citations

4

References

2002

Year

Abhishek Das, Tetsuro Kokubo, Yoshiaki Furukawa, Herbert Struyf, Ingrid Vos, B. Sijmus, Francesca Iacopi, J. Van Aelst, Quoc Toan Le, L. Carbonell,
Microelectronic Engineering

References

YearCitations

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