Optimization of zinc oxide thin film for surface acoustic wave filters by radio frequency sputtering

Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

Tadatsugu Minami, Hidehito Nanto, Shinzo Takata · Japanese Journal of Applied Physics · 1984 · 548 citations

Natural Sciences, Materials Engineering, Materials Science +17

Preparation of crystallized zinc oxide films on amorphous glass substrates by pulsed laser deposition

Shunichi Hayamizu, Hitoshi Tabata, Hidekazu Tanaka et al. · Journal of Applied Physics · 1996 · 176 citations

Natural Sciences, Materials Engineering, Materials Science +17

High Resistivity Transparent ZnO Thin Films

D. L. Raimondi, E. Kay · Journal of Vacuum Science and Technology · 1970 · 92 citations

Natural Sciences, Materials Engineering, Materials Science +16

Effects of interface micro structure in crystallization of ZnO thin films prepared by radio frequency sputtering

Y. Yoshino, K. Inoue, Masaru Takeuchi et al. · Vacuum · 1998 · 75 citations

Natural Sciences, Materials Engineering, Materials Science +16

RF Diode Sputtered ZnO Transducers

John D. Larson, Donald K. Winslow, L. Zitelli · IEEE Transactions on Sonics and Ultrasonics · 1972 · 34 citations

Engineering, Materials Engineering, Materials Science +9