Sensors and Actuators A Physical · 2006 · 31 citations · 18 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMaterials PhysicsThin FilmsDielectricsPiezoelectric MaterialsThin Film Mechanical PropertiesThin Film StrainThin-film MaterialsVibration MeasurementPiezoelectric CharacterizationPiezoelectric CoefficientsPiezoelectric EffectPiezoelectric PropertiesPiezoelectric Thin FilmsThin-film Piezoelectrics
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Piezoelectric micromotors for microrobots
Anita M. Flynn, Lee S. Tavrow, Stephen F. Bart et al. · Journal of Microelectromechanical Systems · 1992 · 229 citations
Engineering, Mechanical Engineering, Robotics Engineering +15