Influence of target-to-substrate distance on the properties of AZO films grown by RF magnetron sputtering

<i>Elements of X-Ray Diffraction</i>

B. D. Cullity, R. Smoluchowski · Physics Today · 1957 · 755 citations

Natural Sciences, Materials Science, Physics +12

Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties

K. Ellmer · Journal of Physics D Applied Physics · 2000 · 590 citations

Natural Sciences, Materials Engineering, Materials Science +17

XPS and X-ray diffraction studies of aluminum-doped zinc oxide transparent conducting films

Md. Nurul Islam, Tubai Ghosh, K. L. Chopra et al. · Thin Solid Films · 1996 · 570 citations

Natural Sciences, Materials Engineering, Materials Science +14

The physical properties of Al-doped zinc oxide films prepared by RF magnetron sputtering

Ki Cheol Park, Dae Young, Kun Ho Kim · Thin Solid Films · 1997 · 339 citations

Natural Sciences, Materials Engineering, Materials Science +16

Indium-doped zinc oxide films as transparent electrodes for solar cells

S.S. Major, K. L. Chopra · Solar Energy Materials · 1988 · 186 citations

Natural Sciences, Materials Engineering, Materials Science +16