A new condenser microphone with a p+ silicon membrane

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Scaling limits in batch-fabricated silicon pressure sensors

Hin-Leung Chau, K.D. Wise · IEEE Transactions on Electron Devices · 1987 · 162 citations

Engineering, Materials Engineering, Materials Science +17

A subminiature condenser microphone with silicon nitride membrane and silicon back plate

Dietmar Hohm, Gisela Hess · The Journal of the Acoustical Society of America · 1989 · 103 citations

Engineering, Mechanical Engineering, Physics +16

Residual stress and mechanical properties of boron-doped p+-silicon films

Xiaoyi Ding, Wen H. Ko, Joseph M. Mansour · Sensors and Actuators A Physical · 1990 · 99 citations

Natural Sciences, Materials Engineering, Materials Science +16

Development of an electret microphone in silicon

A.J. Sprenkels, R.A. Groothengel, A. Verloop et al. · Sensors and Actuators · 1989 · 52 citations · Full text

Engineering, Electrical Engineering, Materials Science +12