Concepedia

Boron ultra low energy SIMS depth profiling improved by rotating stage

M. Bersani, D. Giubertoni, Erica Iacob, Mario Barozzi, S. Pederzoli, L. Vanzetti, M. Anderle

Applied Surface Science · 2006 · 13 citations · 5 references

DOI

Concepts

References

5

Improved depth resolution by sample rotation during Auger electron spectroscopy depth profiling

A. Zalar · Thin Solid Films · 1985 · 249 citations

, , +7

Secondary ion mass spectrometry and atomic force spectroscopy studies of surface roughening, erosion rate change and depth resolution in Si during 1 keV 60° O2+ bombardment with oxygen flooding

Z. X. Jiang, Paul F. A. Alkemade · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 54 citations

, , +15

Ultra-low energy SIMS analysis of boron deltas in silicon

Nicolas Baboux, J.C. Dupuy, G. Prudon et al. · Journal of Crystal Growth · 2002 · 20 citations

, , +7

SIMS depth profiling with sample rotation in a cameca IMS 3F

D. E. Sykes, A. Chew · Surface and Interface Analysis · 1994 · 17 citations

, , +16

Sub-keV secondary ion mass spectrometry depth profiling: comparison of sample rotation and oxygen flooding

R. Liu, Andrew T. S. Wee · Applied Surface Science · 2004 · 15 citations

, , +9