Concepedia

Role of transverse magnetic field in the capacitive discharge

S. J. You, Tao Hai, Min Park, D.W. Kim, J.H. Kim, D. J. Seong, Yeon-Kyun Shin, S.H. Lee, G.Y. Park, J.K. Lee,

Thin Solid Films · 2011 · 34 citations · 33 references

DOI

Concepts

References

33

Measurement of electron energy distribution in low-pressure RF discharges

Valery Godyak, R. B. Piejak, B. M. Alexandrovich · Plasma Sources Science and Technology · 1992 · 759 citations

, , +15

Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz

Valery Godyak, R. B. Piejak · Physical Review Letters · 1990 · 552 citations

, , +14

Simultaneous Potential and Circuit Solution for 1D Bounded Plasma Particle Simulation Codes

John Verboncoeur, M. V. Alves, Vahid Vahedi et al. · Journal of Computational Physics · 1993 · 457 citations

, , +12

Electron kinetics in non-uniform glow discharge plasmas

L. D. Tsendin · Plasma Sources Science and Technology · 1995 · 274 citations

, , +16

Dynamic model of the electrode sheaths in symmetrically driven rf discharges

Valery Godyak, Natalia Sternberg · Physical Review A · 1990 · 271 citations

, , +15