IEEE Transactions on Nuclear Science · 1986 · 14 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceRadiation DetectionRadiation MeasurementSpectroscopyRadiation SpectroscopyX-ray Data AnalysisX-ray DetectionX-ray DetectorsX-ray OpticsX-ray SpectroscopyDetector CharacterizationDetector Energy ResolutionEnergy Dispersive X-ray SpectroscopyEnergy-dispersive X-ray SpectroscopyRadiation Energy ResolutionScanning Electron MicroscopySensitivityX-ray Spectra
A mercuric iodide energy dispersive x-ray spectrometer, with Peltier cooling provided for the detector and input field effect transistor, has been developed and tested in a scanning electron microscope. X-ray spectra were obtained with the 15 keV electron beam. An energy resolution of 225 eV (FWHM) for Mn-Kα at 5.9 keV and 195 eV (FWHM) for Mg-K line at 1.25 keV has been measured. Overall system noise level was 175 eV (FWHM). The detector system characterization with a carbon target demonstrated good energy sensitivity at low energies and lack of significant spectral artifacts at higher energies.
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