Atomic force microscope using piezoresistive cantilevers and combined with a scanning electron microscope

Abstract

We demonstrate the use of piezoresistive cantilevers with an atomic force microscope that operates in conjunction with a scanning electron microscope. This is a very attractive combination because the two microscopes complement each other in terms of depth and lateral resolution, field of view, speed, and ability to image insulating surfaces. Images of a grating and an integrated circuit are shown as examples. Simultaneous operation in real time was achieved.