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Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials

Materials ScienceSurface CharacterizationOptical MaterialsEngineeringOptical PropertiesSpectroscopySurface ScienceApplied PhysicsSurface AnalysisMultilayer MaterialsOptical SpectroscopyNon-destructive Characterization TechniqueSpectroscopic PropertySpectroscopic Method