Sensors and Actuators A Physical · 2001 · 11 citations · 17 references
Natural SciencesOcean EngineeringPhysicsAcousticsOcean AcousticsUnderwater AcousticsAcoustic MeasurementAcoustic SensingAcoustic Sensing SystemsAcoustic SensorsTransducer TechnologyWave MeasurementsAcoustic Transducer DesignAcoustic Wave MeasurementSurface Acoustic Waves
17
Micromachining Using Excimer Lasers
Hans Kurt Tönshoff, D. Hesse, J. Mommsen · CIRP Annals · 1993 · 56 citations
Engineering, Manufacturing Engineering, Microfabrication +10
Excimer laser micromachining and replication of 3D optical surfaces
Anika Braun, K. Zimmer, B. Hößelbarth et al. · Applied Surface Science · 1998 · 53 citations
Engineering, Manufacturing Engineering, Materials Science +14